World’s First
Copper-Free Silicon Wafers

Deeplight copper-free silicon wafers provide a clean, thermally stable substrate for Si₃N₄ and hybrid photonic circuits, enabling low-loss waveguides and repeatable soliton microcomb operation at wafer scale.

World’s First Copper-free silicon wafers are now available for evaluation
and production orders

Key features

Copper-diffusion blocking technology

Prevents copper migration into oxide and nitride layers, enabling stable, predictable photonic device behaviour.

Ultra-low optical loss platform

Provides a clean substrate for high-Q Si₃N₄ waveguides with reduced absorption and thermal drift.

Deterministic soliton microcomb stability

Supports reliable and repeatable soliton generation, even at low repetition rates (~40 GHz).

Key specifications

Thermal oxide thickness

High-quality THOX undercladding ranging from 0 to 9,000 nm.

Wafer size

Standard 4 and 6-inch silicon wafer optimized for Si₃N₄ and hybrid photonic integration.

Substrate material

Proprietary copper-free silicon substrate engineered to eliminate Cu contamination during fabrication.

Copper-free wafers block copper diffusion, keeping oxide and nitride layers clean and stable.
Copper-free substrates enable longer, more stable soliton steps for deterministic microcomb generation.
Cu-free wafers reduce excess absorption, suppressing the Kerr-thermal effect and enabling longer, more stable soliton steps.

Our copper-removal technique which overcomes thermal instabilities for deterministic soliton generation, is detailed in a Nature publication by Ji et al. (2025)