Silicon Nitride Photonics
Fabrication Run

Your silicon nitride photonics designs fabricated on the copper-free silicon nitride platform behind our own products.

Research groups and development teams that need a chip beyond our catalogue get the same substrate, the same photonic Damascene process developed at EPFL and licensed to Deeplight, and the same building blocks we use ourselves: copper-free silicon wafers, thick Si₃N₄ resonators, monolithic Sc doped-AlN piezo actuators and micro-heaters. A device that works in a Deeplight run is already a Deeplight device, one step from a product or from partner manufacturing.

Deeplight is not a general-purpose PIC foundry and may decline designs outside this scope.

Data Sheet

From Substrate Innovation to Fabrication Access

A soliton microcomb is only as stable as the substrate underneath it.

Absorption in the substrate heats the resonator and drifts it in the very moment the soliton forms. Deeplight's copper-free silicon substrate and photonic Damascene process remove that absorption at its source. That is why single solitons on our platform are reached deterministically with simple laser tuning, in our products and in your devices.

Start with a shared-reticle device run for your first devices and design iterations, or take a dedicated wafer run when you need the full wafer for your own variants.

Key Features

Ultra-low thermal absorption

Proprietary copper-free Silicon wafers eliminate parasitic heating, improving soliton stability.

Thick Si₃N₄ films (> 800 nm)

High anomalous dispersion and strong Kerr nonlinearity for broadband comb initiation.

Ultra-low Propagation loss (< 3 dB/m)

Enabled by our proprietary Photonic Damascene process, delivering the high-Q micro-resonators required for stable soliton generation.

Design support included

Dispersion and coupling design, DRC-verified layout and tested resonator and actuator building blocks, from the engineers who design our own microcomb modules and lasers.

Monolithic Integration of Piezo actuators and micro-heaters

Add active tuning to your photonic chip. Piezo actuators deliver high-linearity, low-power mechanical control, while integrated micro-heaters handle thermal tuning

Shared-reticle and dedicated runs available

flexible options from academic R&D prototyping through to dedicated wafer runs for proprietary designs.

Intrinsic linewidth distribution of a thick silicon nitride 50 GHz ring resonator, C-band — Figure 1: Measured intrinsic linewidth distribution of a thick silicon nitride 50 GHz ring resonator in the C-band, corresponding to an intrinsic Q factor of ~20 million.

Propagation loss of a thick silicon nitride waveguide across the C-band — Figure 2: Measured propagation loss of a thick silicon nitride waveguide across the C-band, extracted from a 50 cm long spiral.

Fabrication Run Options

Choose the run type that fits your project stage and development goals.

	Shared-reticle device run	Dedicated wafer run
Best For	First devices and design iterations: research groups and development teams building soliton microcombs, Kerr combs, linear and nonlinear waveguides	Your own variants on your own wafer: pilot quantities and proprietary designs
Cost Model	Shared wafer cost across multiple users	Dedicated wafer pricing
Design Flexibility	Standard reticle allocation	Full reticle customization
Turnaround	Scheduled run calendar	Priority scheduling available
SiN Thickness & Wafer size	200 nm & 900 nm, 4 inch	Custom thickness available, 4 inch
Add-ons	Micro-heaters, Piezo actuators, DRC check	Micro-heaters, Piezo actuators, DRC, packaging support